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This microscope offers high resolution secondary electron imaging at pressures as high as 10 torr and sample temperatures as high as 1,000 °C. This means that wet, oily, dirty, outgassing and non-conductive samples can be examined in their natural state without significant sample modification or preparation.
A series of pressure-limiting apertures integrated in the pole piece creates different levels of vacuum in the specimen chamber and in the column. High pressure, thus created in the chamber, combined with gaseous secondary electron detectors, permits the observation of non-conductive and wet specimens, with resolution of 2 nm.
The microscope also works in the conventional high vacuum mode, providing high resolution images of conductive specimens (2 nm at 5mm working distance).
The instrument has been provided also with an
Accelerating voltage: 0.2 to 30kV
Electron gun: Schottky field emission source.
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