Lithography  Research Facilities

LitographyE
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Mrs. Maya Veinguer
Mrs. Olga Raslin

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Structures larger than a micron are being made in the optical lithography laboratory. Exposing a layer of photo-resist to blue light through a mask, which has the desired pattern printed on it, is used to define the structures. Subsequently, the semiconductor chips are etched through the photo-resist mask to produce the actual device.