Nanofabrication

Nanofabrication services are all maintained and continuously updated by a capable team of experts at the Nanofabrication Unit led by Ora Simcha Bitton Israel.

 

Photolithography

Laser Beam Lithography (Heidelberg)

Electron Beam Lithography (Raith Plus)

Atomic Layer Deposition (ALD)

Stylus Profilometer (Bruker)

Optical Profilometer (Zeta)

E-beam and Thermal evaporators (Odem, Edwards and in-house built) with temperature and height control

Wire Bonding Station

Sputtering

ICP Etching