Evaporators (Metal and Organics):
The E-beam system sputters metal and dielectric materials to form thin coverage with uniform thickness. E-beam evaporation uses an electron beam to heat a source until it evaporates. Electrons are generated with a heated filament and are accelerated to a velocity of several kV.
We also use the e-beam evaporator for Indirect, Collision Induced, Cooled Evaporation (ICICE) where the deposited material collides with Argon atoms before deposition on our substrate which is not facing the source. This gives a gentler contact suitable for organic monolayers.
Wet Chemical Labs
Asher and UVOCS