About Usnanofabrication

About Us

Our Nanofabrication center is a state-of-the-art cleanroom facility for interdisciplinary research in nanoscience and applied nanotechnology. The Nanofabrication center is designed for the fabrication of sub-micron devices and nano devices and has a 170-meter square cleanroom of class 1000 equipped with a full suite of tools supporting device fabrication and characterization.

The center provides service to all the faculties at the institute. Our center supports researchers in applications ranging from biology to fundamental physics. The research areas studied at our center are Bio-devices, Nanoelectronics devices, Energy, MEMS/NEMS, Materials science, Nanotubes/wires, Nanophotonic, and Fundamental Physics.

The facilities in the center can be divided into five main categories

  • Lithography 
  • Deposition 
    • Physical Vapor Deposition (PVD) 
    • Chemical Vapor Deposition (CVD) 
  • Etching 
  • Metrology 
  • Additional tools 

We welcome researchers from all disciplines and faculties to use the available tools at the center. 

Featured Instrumentation

E-Beam writer RAITH E_Line Plus Electron Beam Lithography


MicroWriter ML®3