Company: Seki Diamonds

Model: SDS 6380 (5kW) with interchangeable stages

Description: The SDS 6380 is a 5kW MW powered CVD system that enables the growth of high-quality single crystal diamond. The CVD is equipped with interchangeable, cooled and heated, stages. The cooled stage is used for the growth of thick layers (>100’s of µm) at high growth rates, and the growth of thin δ-doped layers can be achieved with the heated stage. The tool is equipped with turbo molecular pump and supplied with >7N hydrogen and >6N CH4 and O2 process gasses for high purity diamond products.

Features

• Flexible configurations for demanding polydiamond and single crystal processes
• Stainless, cold-wall chamber
• Heated and/or cooled stage
• Multiple ports for plasma viewing and in-situ diagnostics, e.g. OES, RGA
• Recipe-driven computer control and manual operation

Applications 

• High-power density plasmas — accelerated growth rates
• Optical grade, highest quality microcrystalline diamond (2” diameter)
• Various thermal grade, high growth rate microcrystalline diamond (2” diameter)
• Single-crystal diamond — high growth rate and device quality
• δ-doping
• C13 enriched diamond