E-Beam writer RAITH E_Line Plus Electron Beam Lithography
Instrumentation
Laser engraving
AFM/SPM Dimension Edge
AJA Sputter ATC-1800
ALD- Fiji™ Plasma Atomic layer deposition system
Angstrom Evaporator
Angstrom Organic Evaporator
Bambu Lab X1E with AMS
Chemical Workstations
Chemical-mechanical planarization (CMP)
CVD SDS 6380 Seki Diamonds
Diamond laser sawing
Elegoo Saturn 4 Ultra – High-Speed 12K Resin 3D
Ellipsometer
Mask Aligner
Mechanical polishing
Microfluidics workstation
MicroWriter ML®3
Odem Evaporator
Olympus BX51 optical microscope
Optical stereo microscope Olympus SZX16
PECVD-Plasma-Therm Plasma Enhanced Chemical Vapor Deposition
Plasma Asher
Profilometer
PT ICP – Plasma Therm ICP PTI-SHUTTLELOCK
RTP
Scriber
SEM (Scanning Electron Microscope) JSM-7000F
SPTS ICP - Omega LPX Rapier Etch System
UHV thermal annealing
Wirebonder
Zeta Optical Profiler