Instrument Specification
Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry measures the change of polarization upon reflection or transmission and compares it to a model.
The ellipsometer enables one to accurately measure thicknesses and optical constants of thin film simultaneously and is used for the characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.), including Anti-Reflection coatings and organic light emitting diodes.
Location
Perlman building –1 floor, room 9 (white room)
Staff Contacts
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Dr. Eran Mishuk
Research & Development Engineer
Training information
- Meeting with the tool owner for presentation and discussion of the desired application, and set up a strategy for student qualification – 1hr
- Theoretical introduction to the machine and hands-on training with tool owner – 1hr
- Qualification test with the tool owner - 1hr